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Application of laser cleaning machine in semiconductor cleaning machine

Time: 2020-09-29 13:53 Reading: one hundred and seventy-six second
With the continuous miniaturization of semiconductor technology, the integrated circuit manufacturing process is becoming more and more complex, which often requires hundreds or even thousands of process steps. For advanced semiconductor device manufacturing, after each process, there will be more or less particulate pollutants, metal residues or organic residues on the surface of the silicon wafer, which are described below Laser cleaning machine In semiconductor components cleaning applications.

With the continuous reduction of device characteristic size and the increasing complexity of three-dimensional device structure, semiconductor devices are more and more sensitive to particle pollution, impurity concentration and quantity. The key point of the cleaning technology is to overcome the great adsorption force between the contaminated particles and the substrate. The traditional chemical cleaning, mechanical cleaning and ultrasonic cleaning methods can not meet the requirements, and laser cleaning can easily solve this problem.

With the continuous reduction of the size of integrated circuit devices, the material loss and surface roughness in the cleaning process have become the problems that must be paid attention to. Removing the particles without material loss and graphic damage is the most basic requirement. Laser cleaning technology has non-contact, no thermal effect, no surface damage to the object to be cleaned, and no secondary pollution It is the best cleaning method to solve the pollution of semiconductor devices.

Advantages of laser cleaning:

1. Laser cleaning is non-contact, which can be transmitted by optical fiber and combined with robot or manipulator to realize remote operation and clean parts that are difficult to reach by traditional methods;

2. The laser cleaning equipment can be used stably for a long time. It does not need consumables and only needs a small amount of electricity. It has the advantages of low maintenance and operation cost. It can easily realize automatic operation and can be put into infinite circulation at one time;

3. Laser cleaning is a new application of surface engineering treatment, which can remove different types of pollutants on the surface of various materials and achieve high cleanliness. Wuhan Ruifeng photoelectric laser equipment is cost-effective, with years of laser research and development experience, product technology is mature, product performance is safe and stable. Ruifeng photoelectric laser always adhere to the "quality first, service second, price third" attitude, to provide customers with the best quality products and services.

The above is the application of laser cleaning in semiconductor components cleaning. This green cleaning method of laser cleaning is gradually paid attention to. Therefore, laser cleaning is a trend in the future. Laser cleaning will replace part of traditional sand blasting or pickling, but it will take a long time for laser cleaning to completely replace traditional technology. With the progress of laser cleaning, sandblasting and pickling may also improve the process.



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